Aféierung vun wafer Carrier
PRODUIT KATAGORIE
▶Wafer Carrier System fir PECVD & TALOX Prozess
• PECVD & TALOX Graphite Boot (M4~M12)
• Vertikal SM-Boot (M4, M6)
• Implantat & Dusch Graphite Deel (M4~M6)
• C / C Schacht & Keramik Beschichtung
• Metal RIE-Tray & Keramik Beschichtung
• Vakuum Dichtung: O-Ring & SQ-Ring
▶Texturéieren & Naass Ätzen Transferprozess
• LSC H-Carrier oder Kassett (M4~M12)
• LSC V-Carrier oder Kassett (M4~M12)
• ASC Carrier oder Kassett (M4, M6)
• W/F Carrier & Storage Box (M4~M12)
• Transport Rad (Roller) Serie
▶Solar Zell Carrier & Metal Carrier
• TRC Carrier oder Kassett (M4~M12)
• Magazin (mat BELT)
GRAPHITE BOAT (H-Typ)
19P6-216CT (WF M4~M12)
GRAPHITE BOAT (H-Typ)
21P6-240CT WF M4~M12)
GRAPHITE BOAT (H-Typ)
23P7-308CT(W/F M4~M12)
GRAPHITE BOAT (H-Typ)
22P/7-294TP (W/F M4~M12)
GRAPHITE BOAT (H-Typ)
W182-22P7-294CT (W/F M12)
W182-21P6-240CT (W/F M12)
WF CARRIER & STORAGE BOX (~M12)
C/C TRAY oder CARRIER (M4~M10)
C/C TRAY oder CARRIER (M4~M10)
VERTIKAL BOAT (SM) M6
LSC-H-CARRIER(~M12)
LSC-V-CARRIER(~M12)
ASC CARRIER (~M6)
TRC CARRIER(~M12)
TRC CARRIER(~M12)
GRAPHITE-BOAT(M12)
Wafer Carrier System fir PECVD Prozess
▶ GRAPHITE BOAT (CT-entworf) M10 / M12 Prozess
• SPECIAL DESIGN CONCEPT
▶ GRAPHITE BOAT (CT-entworf) M4 / M6 Prozess
▶ BOAT Accessoiren Deeler
▶ VERTICAL BOAT-161.7mm WAFER
▶ VERTICAL BOAT-166mm WAFER
▶ VERTICAL BOAT-161,7 mm, 166 mm WAFER
Solar Zell Carrier & Metal TRC Carrier
TYPE: Automatisatioun
WAFER GRÉISST: ① 156 × 156 MM ② 156.75 × 156.75 MM
③161.7x161.7MM ④166x166MM
⑤ 180 × 180 mm ⑥ 210 × 210 mm
GEBRAUCH: Carry (Kassett)
Kapazitéit: 100 Blatt
PITCH: 4.76MM/5.953mm/6.35mm
Dimensioun: ongeféier 559 × 220 × 220 MM
Ongeféier 712 × 260 × 260 MM
Virdeel: Atmosphär
MATERIAL: FLAM, SIDE BAR-Aluminium (anodiséieren)
SIDE PLATE-POM (Antistatesch)
Cover of bottom bar-EPDM/PU/VITON (ASE)
TRC-METAL CARRIER (U'SER LINE)
TRC-METAL CARRIER (U'SER LINE)
TRC-METAL CARRIER (U'SER LINE)
DUSCHPLATE & IMPLANT, TRÄGER
